Used KLA / TENCOR AIT UV+ #9228106 for sale

ID: 9228106
Wafer Size: 12"
Darkfield inspection system, 12".
KLA / TENCOR AIT UV+ is a wafer testing and metrology equipment that uses ultraviolet radiation to precisely measure patterns on a wafer's surface. This system offers unparalleled accuracy, with a field of view roughly 40 times that of an optical microscope. By taking very precise measurements, the unit is able to identify imperfections in structures that are too small to be seen by optical microscopes. At the heart of the machine lies its advanced optical design. This design uses a patented optical technique called Ball Lens Mapping that allows for the very high resolution of UV imaging. The tool uses a series of lenses and mirrors to collect and focus light emitted by the wafer, then divides that light into three color bands (UV, visible blue, and visible green). A digital CCD camera captures an image in each of the color bands separately, in order to produce a detailed image of the sample. KLA AIT UV+ can also perform a variety of metrology functions. It is equipped with a calibration arm that can measure the width and spacing of different structures on the wafer. It also has an automated feature extraction engine that can measure features on the wafer down to 0.01 microns in resolution. By using this automated asset, users are able to quickly identify, inspect, and correct surface defects in the production process. TENCOR AIT UV++ model is extremely fast and efficient. Its unmatched precision and real-time analysis capabilities allow for quick and accurate characterization of structures on a wafer's surface. With its automated feature extraction engine, users can inspect surfaces quickly and accurately, allowing for maximum accuracy and throughput. The equipment is easy to use and offers the flexibility and functionality needed to meet the changing needs of the semiconductor industry.
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