Used KLA / TENCOR AIT UV #9257792 for sale
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ID: 9257792
Wafer Size: 8"
Vintage: 2003
Dark field wafer particle inspection system, 8"
(2) Open cassette wafer loaders
SECS-GEM
High resolution image grab
HLAT
IADC
Patch grab
Real time classification
RTA
Signal tower
Spot size: 2.2 UM
Spot size: 3.5 UM
Spot size: 5 UM
Wafer shape: SNNF (Semi Notch No Flat)
(2) Cassette ports
KM-803P-K Wafer cassette 8" PP
No SMIF Interface
Advanced patterned wafer inspection system
Laser: UV Laser for 90 mW (364 nm)
Microscope review objectives: 50x, 100x, 150x
Computer
Image computer
Keyboard
Floppy Disk Drive (FDD)
Wafer handler: Dual open cassette loader, 8"
Robot
Prealigner
Includes:
Pillar module
Blower unit
No PSL 0.494 um wafer
No caltile wafer
CE Marked
2003 vintage.
KLA / TENCOR AIT UV is a wafer testing and metrology equipment designed to quickly and accurately diagnose defects in semiconductor devices. It inspects the surface of dice and die pads on semiconductor wafers to reveal and analyze potential defects, such as scratches, pits, chips, and voids. KLA AIT UV utilizes UV lithography and optical shifting technology to locate and inspect the surface of device areas under inspection. The systems high-resolution objective lens is capable of probing the device areas, detecting voids, cracks, defects and other abnormalities. The high-resolution imaging capability offers the user a powerful set of image processing tools to review and analyze results. TENCOR AIT-UV can inspect devices in a variety of formats including bare die, packaged components, fiber-patterned substrates, and cured and uncured displays. It is capable of performing non-contact X-Ray imaging, offering distortion free magnification, and providing feedback on fine line sizes, transistor size and some other device parameters. In addition, KLA AIT-UV's advanced pattern matching technology is designed to quickly inspect various elements of the device under inspection and to validate images. This data is then used to indentify potential discrepancies that might be present between the device under inspection and the baseline design. KLA / TENCOR AIT-UV also boasts the ability to run a variety of data analysis tests. These tests can be used to diagnose defects and analyze yield issues, such as down-die yield and product quality. Its automated system can perform multiple tests on the same wafer in one pass, saving time and money. Furthermore, it offers advanced metrology capabilities that can be used to evaluate fab yield data. AIT UV features a user-friendly software unit that simplifies the testing and metrology process.The advanced user interface allows users to create and store recipes, program multiple stages of testing, and terminate testing sessions whenever necessary. This makes the machine extremely flexible and fast - users can quickly configure and run tests with minimal effort. Overall, TENCOR AIT UV is a versatile and powerful wafer testing and metrology tool that provides users with an efficient and accurate method of locating and diagnosing defects in semiconductor devices. With its high-resolution imaging capability and innovative pattern matching technology, the asset is ideal for performing rapid inspection and analysis of high precision device areas.
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