Used KLA / TENCOR AIT XP+ #9087846 for sale
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Wafer Size: 8"
Patterned wafer inspection system, 8" Handler: (2) SMIF Ports type: Asyst – INX2200 Robot: ATM-407B-2-S-CE-S293 (Dual Puck) / Brooks (PRI) GEM / SECS HSMS SFTWFR SW (OS): ms-Windows NT 4.0 SP6 SW (APP): 6.2 Build 40 SP14 180-264 V, 60 A, 50/60Hz, EU (4-Pole, 5-Wire) CE Marked 2000 vintage.
KLA / TENCOR AIT XP+ is a wafer testing and metrology equipment designed to enable the highest level of process control and asset utilization for mask shops, wafer fabs and other semiconductor foundries. It combines Multiple Energy Layer metrology and large area imaging to enable rapid and repeatable measurements of complex device features. The system utilizes state-of-the-art computational technologies such as Deep Learning and Artificial Intelligence to enable the elimination of particle and surface inspection and reduce downtime. The unit is also capable of processing multiple wafers at a single point in time. The machine utilizes 6-layer metrology to measure different aspects of the device feature, such as thickness, geometry and contour, with an impressive accuracy of up to 14nm. It has a variety of features and capabilities to ensure precise, repeatable measurements and reliable process control. The tool is designed for both standalone and inline applications, and is capable of in-line process control and monitoring both through continuous monitoring and event control, as well as enabling edge control. Additional capabilities such as process control and data mining offer more accurate control over process parameters and allow for improved process yields. In addition, the asset is capable of automatic defect classification and defect-based process validation, up to three times faster than previous models. Its ability to detect incoming material defects and classify them offers more efficient processes for wafer testing and metrology. Finally, the model also has a range of software and communications options. This includes two Ethernet ports and two RS-232 ports for external communication, as well as available software for data collection, analysis and reporting. Overall, KLA AIT XP+ is an advanced, powerful, and reliable equipment that meets the industry's most demanding requirements for wafer testing and metrology. It features a range of features and capabilities to ensure precise, repeatable measurements and reliable process control. It also includes comprehensive software, communication, and networking options to ensure smooth utilization of the system in almost any foundry environment
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