Used KLA / TENCOR AIT XP #9122532 for sale
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ID: 9122532
Wafer Size: 8"
Vintage: 2000
Wafer inspection system, 8"
Part number: 564249
2000 vintage.
KLA / TENCOR AIT XP is a highly advanced wafer testing and metrology equipment engineered to provide reliable and accurate metrology data for process and product improvement. At the core of KLA AIT XP is a wafer stage system with a built-in RockSolid™autofocus and alignment capability that ensures accuracy and repeatability of measurements. A dual-axis Z scanning movement enables soft movements during scanning and eliminates misalignment and distortion. This advanced technology also provides flexibility with optional stages for advanced requirements such as high temperature, low temperature, and cryogenic applications. The wafer inspection and metrology unit is equipped with an advanced inspection machine comprised of an ultra-fast spectral imaging technology including advanced illumination techniques, structured illumination, and other techniques to detect defects. This tool is complemented by high-speed advanced image analysis algorithms and robust post-processing to automatically measure a spectrum of defects for high-accuracy testing. The SpectraSouce™ software Suite allows for real-time nanoscale measurements of defects, providing a comprehensive suite for advanced process control. The advanced metrology asset also incorporates a full array of technologies for electron beam, critical dimension (CD), overlay, and other metrology measurements. This includes electron beam mechanisms, stage configurations and a design that supports fast scanning with precision and low noise. The state-of-the-art software Suite offers comprehensive measurements such as CD, overlay, line width, surface roughness, and profile measurements with advanced algorithmic post-processing capabilities. For lithography and advanced process control, TENCOR AIT-XP model is further equipped with an advanced off-axis imaging equipment that supports a range of imaging conditions and aperture configurations. Furthermore, the system integrates top-of-the-line data analysis capabilities and intuitive pattern recognition methods as well as customizable reporting capabilities. To ensure user confidence, AIT-XP unit is rigorously tested and inspected according to strict quality and reliability standards. The machine is further endorsed with a comprehensive technical support for installation and use. Through this, users can expect an improved throughput and yield, reduction of scrap and warranty costs and optimized process control.
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