Used KLA / TENCOR AIT XUV #9113703 for sale
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Wafer Size: 12"
Wafer inspection systems, 12" (2) Load ports Spot size: 3.5 um, 5 um, 6 um Laser: 364 nm 90 mw Resolution: 130 nm (3) Channels defector: Normal channel (2) DF Channels 2006 vintage.
KLA / TENCOR AIT XUV is a wafer testing and metrology equipment. It provides unique insight into the micro and nanoscale features of advanced integrated circuits and other nanostructured materials. With the advancement of ever-smaller semiconductor technology, KLA AIT XUV provides real-time metrology capabilities utilizing State Of The Art (SOTA) photovoltaic, electron and ion imaging techniques. It has the ability to measure device structures down to the nanometer scale and offers rapid acquisition of data due to its high-throughput design. TENCOR AIT-XUV features a miniaturized particle accelerator capable of performing direct on-wafer ion imaging, electron channeling contrast imaging, and x-ray inspection. The system also includes a high-resolution charged-particle microscope for high resolution topographic images. The unit is ideal for analyzing device performance, as well as for optimizing device structures. It also provides comprehensive 2D and 3D information from high-resolution images of both superficial and buried layers. The machine offers advanced Fast Clean and Safe technology, which makes it easy for users to identify and clean material contaminants on the surface of their products. Moreover, the tool offers a high-throughput mode for rapid throughput inspection, as well as low-noise signal processing algorithms for data integrity and improved accuracy. AIT-XUV employs a multiplexer design to increase sample throughput and allow simultaneous scanning of multiple chips. The sample is carefully loaded and unloaded using a highly configurable laser indirect alignment asset to ensure accurate positioning and registration of each part. This model satisfies the stringent requirements of the semiconductor industry in terms of image accuracy, resolution, repeatability, throughput, and sensitivity. In addition, KLA / TENCOR AIT-XUV offers temperature-controlled vacuum chambers with pressure sensors, flux monitors, and temperature controllers. Overall, KLA AIT-XUV is a reliable and versatile tool for detailed examination of nanostructures. It offers high-precision and high-throughput analysis capabilities, making it the perfect choice for microscopic characterization of integrated circuits and advanced materials.
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