Used KLA / TENCOR AIT #149932 for sale

ID: 149932
Vintage: 1997
Defect inspection system, 8" 1997 vintage.
KLA / TENCOR AIT (Advanced Inspection Technologies) is a comprehensive, integrated wafer testing and metrology equipment designed to meet the critical needs of advanced semiconductor applications. The system combines the most technologically advanced techniques and methods to evaluate, measure and characterize a wide range of wafer types, geometry and properties. The unit is built using state-of-the-art optics, imaging and computer vision combined with physics-based analysis and metrology software. The main elements of KLA AIT include a high-resolution camera, image-processing tools, a scanning electron microscope (SEM), image capture and reconstructing machine, photomask reticle, a laser and a 3D profiler. The high-resolution camera detects minute changes in wafer shape and topology to identify subtle imperfections that otherwise may be overlooked. Moreover, it combines this with imaging and motion control software to provide the highest level of accuracy and precise wafer alignment. The SEM is capable of producing images of the wafer surface and can detect a variety of defects that would not be detectable using the camera. Its precise analysis of features present on the wafer, such as moisture and defects, can identify issues early in the production process. The image capture and reconstructing tool enables precise 3D inspection of the wafer. Features such as surface morphology and defects can be analyzed for size and shape. This information can be combined with the camera imagery and SEM data to accurately identify any defects on the wafer. The photomask reticle allows for detailed evaluation of the alignment of the wafer components. The scanning laser is used to laser etch the wafer with patterns, and the three-dimensional profiler provides overall shape and dimensional information. Finally, TENCOR AIT can be integrated with other metrology instruments, such as atomic force microscopes (AFMs) and scanning white-light interferometers (SWLI), to provide a comprehensive suite of wafer testing and metrology capabilities. In summary, AIT is an advanced wafer testing and metrology asset that combines the latest technology and sophisticated software to detect and characterize a variety of wafer types, geometries and features. By utilizing state-of-the-art components and integrating with additional metrology instruments, it provides semiconductor manufacturers with a comprehensive, accurate and precise package of wafer testing and analysis capabilities.
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