Used KLA / TENCOR AIT #9252969 for sale
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ID: 9252969
Inspection system
P/N: 505277
BROOKS AUTOMATION ESC 212 Controller
TQC Process.
KLA / TENCOR AIT is a wafer testing and metrology equipment used primarily in the semiconductor industry. It combines a suite of automated optical inspection (AOI) systems and advanced metrology hardware and software to provide high speed automated wafer scanning, analysis, and measurement capabilities. The system is designed for high-volume wafer testing and metrology, allowing for improved throughput and faster time-to-market. KLA AIT unit includes a combination of automated test equipment (ATE) and an integrated optical measurement machine (OMS) to provide comprehensive testing and metrology capabilities. The tool's optical asset is used to find and accurately locate defects, as well as measure any type of transistor, including highly scaled small geometry devices. The OMS includes a high-resolution camera that can provide 2 µm resolution across the wafer, as well as a range of optical inspection and metrology tools. TENCOR AIT model also features a Pattern Control Equipment (PCS) for automated testing and metrology, providing real-time defect, shape, size, and color data. The PCS's adaptive response technology enables more accurate alignment and feature extraction, resulting in significantly increased yields. The system also features a wafer tracking unit (WTS) which integrates the OMS, PCS, and other technologies in order to monitor wafer movement and prevent contamination. AIT machine's software features a set of user-friendly graphical tools that provide quick and easy access to the tool's tests and metrology capabilities. It features built-in data analysis tools to quickly view results, as well as a set of pattern identification tools to facilitate defect selection and analysis. The asset also includes a suite of wafer analysis functions for production line diagnostics, process control, and process optimization. In short, KLA / TENCOR AIT is a comprehensive wafer testing and metrology model designed to improve throughput, reduce time-to-market, and maximize yields. It provides an integrated AOI equipment with advanced metrology hardware and software, enabling automated testing, analysis, and measurement of transistors at the nanoscale. With its user-friendly tools and built-in data analysis features, KLA AIT system provides an efficient and cost-effective option for semiconductor manufacturing.
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