Used KLA / TENCOR AIT #9389839 for sale

KLA / TENCOR AIT
ID: 9389839
Patterned wafer inspection system.
KLA / TENCOR AIT, a Wafer Testing and Metrology Equipment, are automated wafer inspection and metrology systems for advanced semiconductor manufacturing requirements. It consists of a metal frame with multiple automated robotic tools, which enable precise orientation of the wafer on the chuck table, ultrasonic cleaning, optical inspection, and necessary metrology. The system typically includes a laser interferometer, and a software package which allows for comprehensive control of the device. The laser interferometer is used to measure any distance or location changes on the wafer surfaces. The unit can measure the thickness, flatness, and surface roughness of the wafers with an accuracy of up to 1nm. The machine also includes an automated vision tool, which includes high resolution cameras, optics, lasers, and lighting, that can be programmed for personalized detection. It can detect any kind of contamination or defects on the surface of the wafer, like cracks, inclusions, particles, and scratches. Additionally, it can detect the presence of patterns on the wafer and produce a detailed correlation. Furthermore, the asset also includes automated sampling and image acquisition along with proprietary technologies to yield reliable data points for yield assurance. For instance, it can compare images taken of wafers against pre-defined parameters to determine levels of uniformity and consistency. In addition, the model enables users to manage multiple processes and perform analytical experiments. It offers comprehensive data analysis tools which allow operators to analyze trends and behavior of the wafers with the help of advanced graphical output. It can also help identify process parameters and other equipment variables that may need adjusting for optimal production performance. Due to its flexibility and capability, KLA AIT is widely accepted in the semiconductor industry. This system significantly increases production rate and lowers cost by providing high speed automated inspection and data acquisition capabilities. Additionally, it significantly reduces the inspection time with scanning speeds of up to 800 wafers per hour. Overall, TENCOR AIT is an advanced unit that helps semiconductor manufacturers increase their productivity, quality, and cost efficiency. Its automated tools offer reliable data points for analysis, enabling users to take immediate action to ensure process optimization. Additionally, its automated vision machine provides detailed analysis of contamination and defects. The tool is extremely reliable and cost effective, helping companies reduce inspection time and increase the yield of good wafers.
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