Used KLA / TENCOR AIT #9400274 for sale
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ID: 9400274
Wafer Size: 6"-8"
Vintage: 1997
Patterned wafer inspection system, 6"-8"
Double darkfield inspection tool
SECS II / GEM Communication interface
Low contact chuck
Multi-channel collection optics system with independent
Programmable spatial filters
Wafer transfer area housing cover
Wafer handling module
High voltage electronics
Front / Rear EMO with covers
Fold down keyboard tray with built-in mouse
X/Y Drive / Controller chassis
Motion controller card
Blower box
Flat panel display
Pentium CPU
Manuals
Operating system: Windows NT
1997 vintage.
KLA / TENCOR AIT (Advanced Interactive Technology) is a leading wafer testing and metrology equipment that delivers rapid, reliable, and meaningful information about the quality of nano and microprocessors. The system offers high-end metrology, defect detection, and analytics capabilities to help semiconductor manufacturers produce and monitor integrated circuits. KLA AIT systems use advanced, automated optical inspection algorithms to detect defect in wafers. The unit is designed with sub-micron resolution capabilities, providing the highest level of accuracy and detailed defect analysis. TENCOR AIT's innovative wafer test and metrology technology allows users to quickly and accurately analyze a wafer, pinpoint defects, and measure features and patterns. Additionally, AIT systems also allow users to set up custom-inspections and to monitor processes across multiple sites in order to ensure quality control. When analyzing wafers, KLA / TENCOR AIT systems use multiple imaging technologies including bright field, infrared, and UV respectively. These technologies provide a comprehensive view of the wafer and can identify the most challenging defects and variations. The machine's defect detection algorithms are powered by a patented Declassified AtPixel (DAP) Library, which allows users to visualize, investigate, and measure delicate patterns and defects that would otherwise be difficult to detect. KLA AIT's software is also powerful, offering users an automated, streamlined way to operate the tool. From wafer mapping and pattern recognition to defect analysis and process control, the software allows users to extract crucial data points and make accurate decisions more quickly and efficiently. In addition, the software features advanced analytics capabilities that allow users to review detailed reports, create optical models, and generate data-driven insights. TENCOR AIT is a reliable and comprehensive metrology asset that delivers comprehensive defect detection and robust analytics capabilities. It's intuitive software and advanced imaging technologies offer a comprehensive view of the wafer and make identifying and rectifying defects easier than ever. For semiconductor manufacturers, AIT is an invaluable tool capable of helping ensure the highest level of quality for their products.
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