Used KLA / TENCOR Aleris CX #9315378 for sale
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ID: 9315378
Vintage: 2007
Film thickness measurement system
Dual load port handler, 12"
2007 vintage.
KLA / TENCOR Aleris CX is an advanced wafer testing and metrology equipment specifically designed to provide efficient metrology of a wide range of semiconductor devices. This automated wafer testing and metrology system is designed to operate with maximum throughput and highly accurate measurement results, particularly in the areas of defect review, advanced lithography, parametric testing, and yield optimization. The unit is modular and integrates three main components: The Inspection Machine, the Metrology Tool, and the Feature Comparison Asset. The Inspection Model is a fully automated equipment for high-speed defect inspection, inspection of various powders on a wafer, and inspection of CD, overlay, thickness, resistivity, and flatness. It also supports automatic and manual defect review. It utilizes high-power imaging optics, multi-beam laser scatterometry for non-destructive code, and laser printing for wafer identification. The Metrology System offers advanced metrology capabilities, including CD, overlay, metrology, resistivity, resistance change, flatness, and other high precision measurements. It utilizes advanced software algorithms to provide highly accurate results. It is also highly scalable, allowing for rapid evaluation of multiple wafers in a single run. The Feature Comparison Unit is an advanced metrology machine that provides fast and accurate measurement of transistor devices. It utilizes a combination of image reconstruction algorithms and physical model-based simulation to analyze transistor device features. The tool is designed to measure the timing of transistor devices, as well as other transistor features such as tunnel current and leakage current. KLA Aleris CX is an advanced testing and metrology asset to measure a variety of semiconductor devices with the highest precision and speed. It offers efficient defect inspection, support for multi-beam laser scatterometry, and fast and accurate feature comparison. The model is highly modular, allowing for easy customization of its various components according to customer needs.
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