Used KLA / TENCOR Aleris CX #9380621 for sale
URL successfully copied!
Tap to zoom
ID: 9380621
Wafer Size: 12"
Vintage: 2007
Film thickness measurement system, 12"
(3) Loadports with KAWASAKI robot
With Hard Disc Drive (HDD)
P/N: 020276-001
2007 vintage.
KLA / TENCOR Aleris CX is a wafer testing and metrology equipment designed for semiconductor and MEMS manufacture. It incorporates the latest in optical and x-ray imaging technologies into a high-volume platform for reducing defect levels and improving yield. It helps to reduce cycle time and increase production throughput. KLA Aleris CX employs a 600mm high-speed imaging system capable of inspecting thousands of wafers per hour. It offers two-dimensional (2D) info-gathering capability via dual-head configuration and optional multi-head architecture for proprietary products. This gives the unit four imaging volumes with six independently positioned cameras (two each for defocusing, characterizing, and diffraction imaging). Furthermore, the imaging machine is easily adjustable, allowing it to capture surface features and deeper subsurface features of the fabricated wafers. The tool employs KLA proprietary algorithms to perform inspection and defect characterization. These algorithms allow TENCOR Aleris CX to detect emerging defects and multiple failure modes with high accuracy and sensitivity. Aleris CX also helps automate wafer-to-wafer and wafer-to-reticle inline process correlation. It can compare inspection results across wafers or processes, to quickly identify process excursions and defects. The asset offers fast image capture, detector tilt measurement, and high-speed defect localization. It can also perform in-depth profilometry and detailed 3D topography analysis. Furthermore, KLA / TENCOR Aleris CX's x-ray imaging capability lets it detect thin-film material stacks on unconventionally patterned wafers. KLA Aleris CX has an intuitive, user-friendly graphical user interface (GUI). This intuitive interface, combined with a flexible integration process and modular software architecture, offers a versatile wafer testing solution for manufacturers. With its high-performance imaging and metrology features, TENCOR Aleris CX is an ideal choice for wafer testing and yield management for semiconductor production and other industries such as MEMS and biomedical device manufacture. The model can facilitate cost savings through reduced time-to-market, improve process control, and increase yields.
There are no reviews yet