Used KLA / TENCOR Aleris HT #9231452 for sale
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ID: 9231452
Wafer Size: 12"
Vintage: 2005
Film thickness measurement system, 12"
2005 vintage.
KLA / TENCOR Aleris HT is a state-of-the-art wafer testing and metrology equipment designed for inline quality assurance of semiconductor wafers, complying with the most stringent requirements of the semiconductor industry. The system is, first and foremost, capable of performing full-field test and metrology of individual wafers, placing it at the forefront of the latest advanced wafer testing and metrology technology. KLA Aleris HT uses advanced optics and an on-wafer analysis engine to provide multiple benefits over previous-generation wafer inspection systems. Among the key capabilities of the unit are its speed and accuracy. With the machine being able to image and analyze digital images of the full wafer at up to 750mm/sec, TENCOR Aleris HT can quickly detect any anomalies or faults in a wafer, allowing fast process corrections and corrective action to be taken. Its advanced CCD imaging technology, meanwhile, also ensures the tool provides ultra-high resolution imaging with a pixel size of only 1.1 microns. Low noise, low background noise, and low-noise analytics capabilities enable the capture and render of reliable results. Thanks in part to its ability to capture even microscopic defects, the asset can identify and quantify the full range of faults and faulty patterns, such as latent defects, defect clusters, voids, and particle non-uniformities. This lets Aleris HT detect what is effectively invisible to the naked eye, further enhancing its ability to quickly and accurately diagnose wafer imperfections and pinpoint process issues in a fraction of the time of other systems. KLA / TENCOR Aleris HT also features "true-to-recipe" measurement features, allowing it to validate wafer metrology for defect level acceptance. This helps ensure overall quality control is maintained, especially during complex operations such as CMP or etching. The model also has integrated image streaming and analysis, making it easier to provide process drift data in real-time. On a further note, KLA Aleris HT also uses advanced monitoring technology to track wafer processing and detect environmental changes. This technology, coupled with alarm and OPC functionality, helps to streamline wafer tracking and ultimately minimize downtime. Furthermore, its integrated calibration features ensure that TENCOR Aleris HT is always sound and alert, making light work of wafer testing and metrology tasks. As a comprehensive, high-performance equipment, Aleris HT gives semiconductor process engineers the power to detect potential problems at the earliest possible stage. Ultimately, the system makes it easier and faster to diagnose and correct wafer imperfections so that maximum throughput can be achieved without jeopardizing the production quality.
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