Used KLA / TENCOR Aleris HT #9380623 for sale

ID: 9380623
Wafer Size: 12"
Vintage: 2005
Film thickness measurement system, 12" SpectraFX 1000 HT (2) Loadports with YASKAWA robot With Hard Disc Drive (HDD) 2005 vintage.
KLA / TENCOR Aleris HT is a state-of-the-art wafer testing and metrology equipment that provides advanced robotics, visualization, and measurement capabilities for production of high-performance microelectronic components. It provides a variety of testing options and wafer handling features that help maximize wafer quality and throughput while minimizing cost and time. KLA Aleris HT supports wafer testing on both scanned and limited scanning geometries and includes a scanning electron microscope (SEM) for die-to-die and die-to-edge inspection of complex, sub-micron features. The modular system provides simultaneous inspection of multiple wafers, giving users the flexibility to customize their workflow. With fast inspection speeds and an industry-leading 5-speed inspection scan option, up to 50% faster wafer throughput is possible with TENCOR Aleris HT. In addition to its advanced testing features, Aleris HT also supports wafer metrology. It includes a unique Scanning Near-Field Optical Microscope, which enables extreme high-resolution imaging, to measure a variety of critical features with nanometer precision. With its advanced Scanning Capacitance Microscope, the unit can measure capacitance, resistance, and other electrical properties on individual interconnect structures. Finally, KLA / TENCOR Aleris HT includes a robust library of wafer analysis algorithms, designed to automatically detect and isolate defects on all levels of the wafer structure, from the top to the bottom. KLA Aleris HT's user-friendly interface allows operators to easily configure and monitor their testing and metrology operations. The included internal audit trail function ensures traceability in case of forensic analysis. The machine also includes remote access capabilities that allow for control and monitoring of testing and metrology operations from a central location. In summary, TENCOR Aleris HT is an advanced, all-in-one wafer testing and metrology tool that provides advanced robotics, visualization, and measurement capability to produce high-quality microelectronic components with faster wafer throughput and greater accuracy. With its user-friendly interface, robust library of analysis algorithms, and remote access capabilities, Aleris HT can help manufactures reduce cost and time while ensuring top-tier quality.
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