Used KLA / TENCOR Aleris HX #9407132 for sale

ID: 9407132
Vintage: 2006
Film thickness measurement system 2006 vintage.
KLA / TENCOR Aleris HX is a wafer testing and metrology equipment designed to offer high-performance inspection, test, and characterized metrology results of various types of wafers. The system consists of a precision optical microscope, an automated sample stage and a powerful analysis software. The precision optical microscope within the unit provides an integrated imaging capability which can capture images of the entire wafer surface or individual sites. With an adjustable magnification range between 5x to 100x, the microscope enables users to analyze faults, such as cracks, voids and defects. The microscope is also capable of capturing focused images of single sites, which produces highly detailed images for metrology purpose. The automated sample stage of the machine offers reliable wafer handling and high throughput. It can move the wafer up to 30 shifts per minute, with a repeatability of 0.02 micron in a 600-mm diameter wafer. The stage is also capable of providing high-speed scan, enabling a single scan of 8-inch wafer in less than 3 minutes. The powerful analysis software of the tool provides efficient workflows with integrated user interfaces to improve processing times and reduce user input errors. It also allows users to define interactive analysis conditions, analyze measurement results and report detailed data. Furthermore, it enables users to access its Results Database, which provides customized graphical and tabular reports with data analysis and comparison capabilities. Overall, KLA Aleris HX is a powerful wafer testing and metrology asset that offers high precision, high throughput and user-friendly workflows. It is the ideal model for investigating and characterizing various types of wafers, including substrates, insulators and resistors.
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