Used KLA / TENCOR Alpha Step 200 #293671323 for sale
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ID: 293671323
Profilometer
Computerized surface profiling incorporating TENCOR Instrument
Programmable X, Y Stage option provides automatic measurements
Programmable X, Y Stage-motorized movement
Up to 9 User-programmable stage positions
Real-time analysis-computer calculation
Continual display for delta average
High resolution-routinely measures below 200 A
5 A of Vertical resolution
400 A of Horizontal resolution
Video micro-scope zooms from 40X to 120X
Optional 90X to 270X
High power and 12X to 36X low power magnifications
CRT Display plus integral thermal printer
Built-in internal shock isolation
Digital data handling
Information display.
KLA Alpha Step® 200 is a state-of-the-art wafer testing and metrology equipment. It is designed to deliver the highest levels of accuracy and repeatability in wafer testing and metrology. This system includes an advanced automated optical inspection (AOI) feature, a sub-angstrom step height measurement unit, and a suite of software tools to support a wide range of wafer and chip characterization applications. KLA / TENCOR Alpha Step 200 utilizes a modular design that enables it to be customized to meet specific manufacturer needs. This versatile machine is equipped with a high resolution CCD camera and LED lighting to provide precise optical inspection of wafers and devices. The included intuitive software makes it simple to monitor, analyze, and store data from the tool. The core of KLA ALPHASTEP 200 is its sub-angstrom step height measurement tool. This tool utilizes advanced nano-positioning technology to deliver the most accurate step measurement readings available. The integrated software asset allows users to quickly and accurately evaluate steps as small as 0.05 nm attainable through its sub-angstrom step height recognition detection algorithm. TENCOR ALPHA-STEP 200's versatility makes it an ideal choice for a variety of applications in both research and production. This model can be used for advanced wafer characterization, defect analysis, and advanced metrology. In addition, it supports a wide range of product types, ranging from semiconductor, MEMS, and RF circuits, to nanostructures and many others. Accuracy and repeatability are the key features of ALPHA-STEP 200. It is designed to attain a data resolution of one angstrom or better. The combination of its precise optical inspection and sub-angstrom step height measurement allows users to obtain highly accurate measurements and identify the tiniest of features and defects. In addition, the advanced software suite allows for automated data output, fast process improvement analysis, and assessment of process recipes. KLA / TENCOR ALPHASTEP 200's powerful software also enables a variety of defect and metrology-related data to be managed, organized, and stored. This allows users to customize and optimize their wafer testing and metrology tasks. In summary, KLA Alpha Step 200 is a state-of-the-art equipment that offers precision, repeatability, and accuracy to the most demanding wafer testing and metrology applications.
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