Used KLA / TENCOR Alpha Step 300 #9162861 for sale
KLA / TENCOR Alpha Step 300 is a wafer testing and metrology equipment used in semiconductor device fabrication. KLA Alpha Step 300 is an inspection tool that operates in a "brightfield inverted microscope" configuration, offering a variety of features that enable users to optimize both performance and measurement speed. The Alpha Step provides inspection at an industry-leading 0.5μm resolution with automated focus monitoring and noise and defect suppression, allowing for reliable analysis of high Aspect Ratio materials such as Carbon Nanotubes and MEMS devices. The Advanced Photon Counting and Advanced Photon Counting Split-Beam technologies ensure accurate and repeatable results even in dark field environment. The Alpha Step utilizes a proprietary chrome-on-quartz configuration, which has an advantage over conventional Baumeister optics. This results in faster and higher quality imaging and better throughput in volume production. The system can perform 3D measurements in addition to traditional 2D measurements for more accurate results. It has also been designed to measure "FinFET" transistors, used in the latest manufacturing processes. TENCOR ALPHASTEP 300 is ideal for wafer-level defect metrology, as well as production yield monitoring. It offers wide frequency range support for advanced real-time defect analysis, sizing, and mapping of critical parameters. Automated sound frame analysis helps accurately measure thin film thickness. The unit features different levels of advanced automation, such as front-end sample loading, to address the needs of high-volume production environments. For specific applications, ALPHASTEP 300 can be integrated with advanced metrology systems, such as their WaferMapper and ReticleMapper auto-scanning systems. This allows for correlated and automated data collection and provides increased throughput, better accuracy, and improved defect resolution. KLA ALPHASTEP 300 also gives customers a universal wafer handler interface for loading wafers of varying pitches and sizes with the added benefit of a pull and push feature that allows uniform pressure and temperature to be applied to the sample surface during loading and unloading. Overall, TENCOR Alpha Step 300 is a reliable and easy-to-use wafer testing and metrology machine, that enables accurate and repeatable measurements with high throughput, suitable for both small and large projects.
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