Used KLA / TENCOR Alpha Step 500 #180058 for sale
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KLA / TENCOR Alpha Step 500 is a wafer measurement and metrology equipment designed for optimizing semiconductor manufacturing process control. It provides rapid measurements of critical topography and device characteristics of wafers, in both production and R&D environments. KLA Alpha Step 500 features sub-nanometer accuracy, fast pattern recognition and the flexibility to measure a variety of wafer materials. It also features automated tasks that can be set up, allowing for easy and reliable operation. The innovative "Step per Step" technology utilizes a piezoelectric driven cantilever as a scanning head to measure both the topography and device characteristics of an aluminum single layer. It can capture profiles of arbitrary patterns with sub-nanometer precision and track migrating steps. In addition, its fast response time enables the user to rapidly quantify surface roughness and analyze profile trends. This allows for in-line monitoring of the wafer fabrication processes. TENCOR ALPHASTEP 500 can measure various other semiconductor materials, such as poly-silicon, compound semiconductors, and III-V materials, as well as different types of materials like metal alloys. This allows for the characterization of various types of wafers. The high-efficiency motors reduce tracking force, enabling measurement of arbitrary optical structures. This, combined with the flexible scan area, makes KLA / TENCOR ALPHASTEP 500 suitable for a variety of wafer sizes and formats. TENCOR Alpha Step 500 is easily integrated with leading-edge process control tools, including a high-resolution nanoscale thermal imaging system, which is a key component for monitoring temperature controlled environments. Its highly advanced software tools enable users to control and analyze the data obtained from measurements across the entire wafer. It has a user-friendly graphical user interface, allowing for easy and intuitive unit operation. KLA ALPHASTEP 500 is a powerful and versatile wafer measurement and metrology machine, delivering superior and reliable results even in demanding production environments. It is highly reliable, ensuring accurate wafer measuring and provides the flexibility to meet a wide range of application requirements. It provides a cost-effective, reliable and user-friendly way of optimizing semiconductor manufacturing process control.
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