Used KLA / TENCOR Alpha Step 500 #293660940 for sale
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KLA / TENCOR Alpha Step 500 is a wafer testing and metrology equipment designed for the most demanding wafer measurements and characterization. KLA Alpha Step 500 delivers high throughput and accurate metrology capabilities, making it ideal for semiconductor process development, qualification and production. The system features a dual-axis lens mounted on a variable stage, giving it the flexibility to accommodate a variety of sample sizes and types. It is equipped with an imaging plate, a 16-bit Data Acquisition unit and a high resolution linear motor. TENCOR ALPHASTEP 500 is capable of measuring a diameter of up to 8-inch wafers. It offers both top-down and side-view integrated imaging capturing and edge detection capabilities. Its advanced signal processing techniques, including Defect Signature Analysis, are used to accurately identify defects on the surface of the wafer or the edges of the products. The unit is used to measure parameters like critical dimensions, profile, overlay, and thickness of the material. In terms of automation and software capabilities, the machine includes two user-friendly software - KonicaTM for image acquisition and analysis of defect images and Sigma SuiteTM for acquisition, analysis and display of data. The tool also provides real-time histograms, real-time process control, data trending, custom report generation and traceability by serial number. Alpha Step 500 features best-in-class optical performance and offers a number of advanced measuring capabilities, including full-spectrum process capability, high speed data processing, high resolution vertical profiling and measurements, 100nm repeatability and fast Z-height adjustability. Additionally, the asset is certified under the IS09000 and ESD standards for improved model reliability and safety. Overall KLA / TENCOR ALPHASTEP 500 is an advanced wafer testing and metrology equipment that offers state-of-the-art hardware and software capabilities. It provides fast, accurate and reliable metrology results, making it suitable for various semiconductor processes and production applications.
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