Used KLA / TENCOR Alpha Step 500 #9180951 for sale
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Wafer Size: 6"
Step height measurement system, 6" Stylus-based surface profiler 12.5㎛ Stylus Accurate surface characteristic measurement With resolution to 1A Repeatability: 10Å (1s) or 0.1% With 2D step height metrology profiling Computer controlled scanning Data collection Comprehensive data analysis software Intuitive user interface Zoom optics with magnification (70~210X) Application specific recipes Multi-scan average mode scans up to 10 times Averages the scan before print out Powerful data analysis With up to 30 standard surface parameters selections Enables R&D QA Process control With step height metrology Below 50 nm to 300 μm 1995 vintage.
KLA / TENCOR Alpha Step 500 is a wafer testing and metrology equipment that enables highly accurate non-contact measurements of sample topography. It has a variable scan magnitude with an accuracy of 0.1 nm, allowing for an in-depth understanding of the surface. With a large measurement field of 450 mm x 450 mm and a broad range of objective lenses, KLA Alpha Step 500 is capable of making rapid, high resolution measurements of large wafers. It is an easy-to-use system with a familiar user interface, allowing a wide range of users to effectively utilize the technology. TENCOR ALPHASTEP 500 has a broad range of measurement capability, allowing users to capture high-quality images of three-dimensional features, enabling analysis of fine details of small particles. The device has a well-developed image processing unit that allows for unique, multi-dimensional data extraction, providing values such as mean heights, step heights, flatness, rise height, surface area, angle, profile width, surface roughness and peak to peak heights. Using advanced software for automated sample analysis, ALPHASTEP 500 facilitates automatic image segmentation and integration of data from multiple measurements. The high precision and accuracy of KLA / TENCOR ALPHASTEP 500, along with its adaptability to meet a variety of needs and test parameters, make it an ideal choice for a wide range of industries and applications. It can be used to inspect and measure surface properties of everything from small transparent samples to large opaque areas, as well as higher order features such as bumps and lines. In the semiconductor industry, TENCOR Alpha Step 500 is used for a number of tasks, such as testing of polished wafer surfaces, evaluating grain boundaries, characterizing fine oxide layers, or detecting defects. In addition, the machine is also used for other tasks such as optical character recognition, shape recognition, or label inspection. Overall, Alpha Step 500 is a powerful wafer testing and metrology tool that delivers highly accurate, repeatable, and reliable measurement results. It is an ideal choice for a wide range of businesses, academic and research institutions, and inspection and measurement facilities. With its wide range of features, easy to use interface, and fast operating speeds, KLA ALPHASTEP 500 provides an effective solution for measuring and analyzing wafers and other surface features.
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