Used KLA / TENCOR Alpha Step 500 #9230371 for sale

ID: 9230371
Vintage: 1997
Surface profiler 1997 vintage.
KLA / TENCOR Alpha Step 500 is an automated wafer testing and metrology equipment designed to meet the needs of the semiconductor industry. It utilizes advanced optical interferometry and measurement techniques to measure thickness, curvature, optical properties, and other material details on multiple 200mm and 300mm diameter wafers. KLA Alpha Step 500 has a 3-axis adjustment platform designed specifically with the semiconductor industry in mind, allowing it to accommodate varying wafer sizes and samples in a variety of measurement configurations. This platform can support up to a maximum of 6 wafers for simultaneous measurement, and it is also capable of scanning multiple wafers at once. The laser alignment unit at the base of the system allows accurate alignment of wafers to the unit, while its mover platform and robot autosampler provide precision movement and sample handling capabilities. The machine's core measurement component is an integrated interferometer, which enables the precise high-resolution (< 1nm) measurement of samples with high accuracy. The interferometer's design combines ultra-precise positioning mechanics with resonant frequency technology for unmatched stability and accuracy. This interferometer enables the highest resolution measurements and also allows for aberration-free measurements on curved and uneven surfaces. It also supports a suite of functions such as advanced tool-level diagnostics and maintenance utilities. TENCOR ALPHASTEP 500's integrated software allows the user to easily transition from the asset's basic measurement mode to programmable mode, providing a wide range of process-reliability and advanced automated tests. This software also includes features such as data analytics, analysis, and trend tracking. In addition to the integrated software, this model is also compatible with a variety of different software packages that can be tailored to users' specific needs. KLA / TENCOR ALPHASTEP 500 is an ideal tool for precise wafer inspection and characterization. Its combination of high-end performance capabilities, integrated software, and scalability make it a powerful asset for any semiconductor manufacturing facility.
There are no reviews yet