Used KLA / TENCOR Alpha Step IQ #293593018 for sale

KLA / TENCOR Alpha Step IQ is a wafer testing and metrology equipment that provides automated, high-throughput measurement of electrical properties across wafer surfaces. The integrated hardware and software suite of the system enables users to reduce process optimization times while improving wafer quality. KLA Alpha Step IQ platform's hardware component includes a metrology stage, an imaging module, an electrostatic chuck, and various illumination sources. The stage is equipped with a high-precision motion control unit for precise scanning of the sample surface. The integrated imaging component is a high-precision optical microscope featuring automated focus adjustment and wavelength control. The electrostatic chuck provides a precise, uniform electrical environment for wafer testing. And the illumination sources are designed to selectively detect electrical properties or topographical features on the wafer surface. The measure/test/inspection steps of TENCOR ALPHASTEP IQ's measurement Tool Suite facilitates rapid identification of process excursions and enables users to troubleshoot process issues. It supports a wide range of 2D and 3D metrology techniques, including electrical, residual charge imaging (RCI), spectroscopic reflectance imaging (SRI) and atomic force microscopy (AFM). For electrical metrology applications, its tool suite enables high-resolution transistor channel length and gate width measurements, contact sheet resistance (CSR) measurement and sheet resistance mapping (SRM), as well as current-voltage (IV) and capacitance-voltage (CV) measurements. The software suite is designed to automate and streamline wafer fabrication processes. It contains a suite of algorithms and software routines that facilitate the execution of metrology routines, such as data acquisition, analysis, and report generation. Moreover, the software features a set of advanced algorithms for pattern recognition and analysis. This allows the machine to detect process aberrations quickly, even when the samples vary in size, shape, or electrical properties. Additionally, Alpha Step IQ platform offers connectivity options including an Ethernet-based connection, an analog port for voltage or current output, and a pulse output for images, giving users the flexibility to integrate the tool with any automation or robotics platform. To further extend the asset's capabilities, users can add optional modules such as a single wafer spectrophotometer. Overall, KLA / TENCOR ALPHASTEP IQ is an advanced wafer testing and metrology model that offers high throughput, accuracy, and reliability. Its comprehensive hardware and software components enable wafer fabrication facilities to reduce process optimization times and optimize process performance.