Used KLA / TENCOR Alpha Step IQ #293671815 for sale

KLA / TENCOR Alpha Step IQ is a wafer testing and metrology equipment used for three dimensional optical inspections. It is comprised of a high-accuracy and high-precision step height measurement module, a high-speed full-field optical microscope, and a pattern recognition module with advanced analysis algorithms for defect detection, defect classification, and process monitoring. The system is designed for inspecting full-field, topographical and optically critical defects on semiconductor wafers and substrates. The full-field optical microscope comprises of a high-resolution, high-sensitivity stereo camera, a low-noise CCD-based detection unit, and a high-accuracy, automatic positioning machine. This combined tool accurately captures the topography and defect images of the wafer surface. It can also detect and analyze high-resolution probes and nanoprobes for additional metrology measurements. The high-accuracy and high-precision step height measurement module measures the razor thin surface topographies of the wafer with extreme accuracy and precision. This module Inch can detect tiny bumps and machining artifacts on the wafer surface, ensuring a high level of process/product control. Additionally, this asset is capable of measuring the height and lateral dimensions of material features that are critical for the microelectronic device manufacturing processes. The pattern recognition module employs advanced algorithms for defect detection and classification of the defects. In addition, this module can also automate measurements of critical process parameters for process monitoring and characterization. This model can detect and classify physical defects such as particles, scratches, and micro-shorts. Additionally, the pattern recognition module is capable of analyzing the unique optical signatures of defects such as crystal defects, delaminations, oxidation, and lift-off residues. KLA Alpha Step IQ is capable of measuring topographical properties of flat wafers as well as complex topography patterns with a wide range of topographical profiles such as wafer bow and wafer tilt. Additionally, the equipment is capable of performing non-contact metrology measurements such as feature size, aspect ratio, and topography. It is also capable of measuring optical characteristics of wafers such as reflectivity, transmittance, and refractive index. Overall, TENCOR ALPHASTEP IQ is an advanced wafer testing and metrology system which provides improved accuracy and performance compared to other systems in its class. Its accuracy, precision, and defect detection capabilities make it an ideal choice for semiconductor manufacturing.