Used KLA / TENCOR Alpha Step IQ #293673412 for sale

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ID: 293673412
Surface profiler.
KLA / TENCOR Alpha Step IQ is an automated testing and metrology tool for measuring thinfilm thickness and other properties of semiconductor wafers. The equipment uses an advanced interferometer with milli-angle resolution and a pinhole diaphragm for fast profiling of surfaces. KLA Alpha Step IQ is designed to measure samples without sample preparation. It can easily measure die-to-die variations, contaminants, roughness, film grain, film thickness, and other surfaceproperties. The system utilizes infrared light from a He-Ne laser source to generate visible interference patterns, which are captured with a charge-coupled device (CCD) camera sensor. Through analysis of the interference patterns, the wafer characteristics can be accurately measured. The sophisticated algorithms employed by TENCOR ALPHASTEP IQ utilize 1-D and 2-D Fast Fourier Transform to analyze the interference fringe patterns and extract interfacial data from the wafer's surface. These data are translated into thickness maps of the wafer surfaces, which is used to determine the thickness of the top and bottom layers. ALPHASTEP IQ offers multiple hardware configurations to enable critical metrology applications, such as the measurement of thin film stacks, carrier wafers, and MEMS components. Specialized configurations even enable the unit to measure three-dimensional structures and devices in three axes. KLA / TENCOR ALPHASTEP IQ is also capable of providing fast-scanning measurements of surfaces at sub-micron profiles. TENCOR Alpha Step IQ is a valuable addition to KLA portfolio, due to its superior metrology capabilities. Its fully automated performance eliminates the need for manual measurements, thereby reducing errors and improving efficiency in the measurement of semiconductor wafers. The machine also offers higher throughput and reduced cycle time compared to manual measuring devices. Additionally, KLA ALPHASTEP IQ offers full compatibility with TENCOR integrated suite of software tools, allowing for optimized data analysis, automated analysis, and reporting.
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