Used KLA / TENCOR Alpha Step IQ #293682500 for sale

ID: 293682500
Vintage: 2010
Surface profiler 2010 vintage.
KLA / TENCOR Alpha Step IQ is a state-of-the-art wafer testing and metrology equipment capable of measuring wafer surface features with unrivaled accuracy and repeatability. At its core, KLA Alpha Step IQ relies on cutting-edge patented technology to transport the wafer across a scanning bed, which then uses its lasers to examine and map the surface features down to the nanometer level. Photodiodes are used to measure the reflection from each measurement point to determine the topography of the wafer surface. This photodiode measurement is used to construct a 3-dimensional "contour" map of the wafer's surface. This contour map represents the shape and surface topography of the wafer in a comprehensive and highly detailed manner. This system is capable of measuring a variety of wafer surface features including step height, profile, radius of curvature, slope, and flatness. The accuracy of these measurements is remarkable, with repeatability typically better than 0.5nm achieved in most applications. Using highly advanced electronics and optics, TENCOR ALPHASTEP IQ unit allows for extremely fast scanning - typically only taking a few seconds to complete a measurement across an entire 200mm wafer - allowing for quick throughput and process feedback. The machine also provides powerful built-in analytics, allowing for sophisticated statistical analysis of process results across different wafer lot sizes with ease. Additionally, off-line analysis tools are also available for further process optimization. Finally, Alpha Step IQ includes a wide range of accessories, including specialized fixtures and probing arms, allowing for flexibility in measurement techniques and compatibility with the majority of wafer testing and metrology equipment available today. Overall, ALPHASTEP IQ is a versatile and high-performance wafer testing and metrology tool capable of providing highly accurate measurements and providing unparalleled process optimization capabilities.
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