Used KLA / TENCOR ASET F5 #293825602 for sale
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ID: 293825602
Wafer Size: 8"-12"
Vintage: 1999
Film thickness measurement system, 8"-12"
Wafer holder and chuck
Robot and handler
Laser
Blower unit
Card cage and board
Cassette type: F5W
PC
1999 vintage.
KLA / TENCOR ASET F5 is a wafer testing and metrology equipment designed to test wafer performance at an extremely small level. It combines advanced AFM (Atomic Force Microscopy) and electrical test capabilities to deliver a comprehensive view of critical device parameters. The system is capable of inspecting features down to the 10nm resolution range and is equipped with a full suite of integrated testing solutions. KLA ASET-F5 unit offers several main features which enable it to provide highly accurate performance results. The first of these features is the advanced imaging capability, which enables the machine to take clear and detailed images of features at a microscopic level. The imaging tool uses a wide range of AFM probes, including variable-focus, omnidirectional, and dynamic scanning probes, to ensure the best image quality for a range of applications. The high resolution of the imaging asset also allows for highly sensitive measurements. TENCOR ASET F 5 also includes powerful electrical test features, including a wide range of voltage, current, resistance, and capacitance tests. The advanced electrical testing model combines hardware, software, and calibration tools to ensure accurate and reliable results in assessing wafer performance. In terms of abrasion and contamination testing the equipment offers highly repeatable results. It is able to detect defects that are invisible to the naked eye, and can also measure the force of contacting probes as small as 10um on integrated TDR (Time Domain Reflectometry) traces. The system also has advanced particle analysis functionality, allowing users to detect and identify particles down to 2nm and also to assess the environmental impact of particle contamination. TENCOR ASET-F5 is designed for automated operation as a stand-alone unit or for integration with other systems. It features a RS-232 communications protocol with adjustable timeout settings. The machine has a wide operating range of 0 to 50°C, and more than 15 hours of operation without interruption can be achieved with the optional powered cooling module. TENCOR ASET-F 5 is a powerful and comprehensive wafer testing and metrology tool that offers a versatile range of imaging and electrical test capabilities for wafer performance assessment. Its automatic operation and powerful AFM and electrical testing features make it ideal for a range of industries, from semiconductors and material sciences to research and development.
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