Used KLA / TENCOR ASET F5 #293827457 for sale
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KLA / TENCOR ASET F5 is a wafer testing and metrology equipment designed for semiconductor production line use. It can quickly and accurately measure, inspect and analyze the properties of wafers up to 12 inch in diameter. The system offers a suite of technologies, processes and software programs to enhance the potential accuracy and flexibility of testing and metrology operations. From substrate level to individual device inspection and characterization, KLA ASET-F5 delivers unmatched performance in both throughput and accuracy. Its wafer inspection and metrology capabilities include: High-NA 3D optical and CD-SEM capabilities, OBIRCH (optical beam induced resistance change) for pattern recognition technology and the low-k dielectric layer metrology. TENCOR ASET F 5 utilizes KLA patented X-scan technology to capture the images from the wafer sample, yielding superior repeatability even under the toughest environmental conditions. The unit also features a high-end optics package and the latest software, providing precise imaging and accurate 3D reconstructions. In addition, the machine features precise automation to ensure reliable wafer handling and a clean gas-injected enclosure to maintain ISO-class 4 cleanroom conditions. The tool also has a dual stage sample positioning asset for precise alignment and sample mounting for both mask and bare wafer inspection. The wafer metrology model is also equipped with a customizable sample preparation station. This includes a variety of sample preparation tools such as cleaning, lifters, sample holders, and various Wafer-Level Packaging and CMP tools. This allows the user to select the most appropriate preparation tool for a specific application. Finally, the equipment includes a powerful suite of data analysis tools. This allows for the processing, visualization and analysis of all the images and data generated by the wafer inspection and metrology tools. The software tools also provide actionable insight into wafer quality and process performance, as well as a platform for comprehensive corrective actions. KLA / TENCOR ASET-F5 is a highly advanced system that provides unparalleled performance, precision and flexibility to semiconductor production lines. With its comprehensive suite of features and functions, the unit is an invaluable tool for wafer testing and metrology.
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