Used KLA / TENCOR ASET F5x #9182371 for sale
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Wafer Size: 8"
Film thickness measurement system, 8" 2000 vintage.
KLA / TENCOR ASET F5x is a state-of-the-art wafer testing and metrology equipment, designed to measure physical characteristics of today's advanced semiconductor devices. Its advanced optics and imaging capabilities enable it to detect and accurately measure parameters such as feature size, topography height, and width, as well as defect density and location. This powerful system efficiently analyzes large numbers of samples quickly, providing advanced analysis to ensure device manufacture and reliability. KLA ASET-F5X utilizes an optical microscope for imaging of sample wafers. The microscope is equipped with a variety of lenses for different types of work, enabling the user to select the most appropriate magnification and resolution. In addition, a motorized sample stage allows for independent X- and Y-axis scanning of samples at pre-set heights and depths. TENCOR ASET F 5 X incorporates advanced automated inspection technology, using a suite of algorithms to detect a variety of defects. It is capable of detecting bumps, open defects, pits, scratches, micro-cracks, and other structures with minimum human intervention. Its three-dimensional (3D) shape sensing capability ensures that defects are precisely located on the wafer and results are stored and presented with accuracy. The F5x is an advanced metrology unit, equipped with leading-edge calibration and measurement capabilities. It is able to measure a wafer's geometry accurately and provide detailed topographical maps and data. Its high accuracy metrology features are based on a proprietary triangulation method called Resistive Scanning Laser Interferometry (RSLI). This method rapidly detects the presence of defects up to one nanometer in size. KLA has designed KLA / TENCOR ASET F 5 X with ergonomics and user-friendliness in mind. The machine includes a range of bright, clear LCD screens which enable users to monitor operations without strain. The tool also features an intuitive graphical user interface (GUI) for easy access to the numerous features and functions. All in all, KLA ASET F 5 X is an impressive wafer testing and metrology asset. It offers a wealth of advanced features and capabilities, such as automated defect detection, topography measurement, and advanced metrology. Its user-friendly design and intuitive GUI make it a powerful yet simple tool for wafer testing and metrology.
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