Used KLA / TENCOR ASET F5x #9229841 for sale

ID: 9229841
Wafer Size: 12"
Vintage: 2003
Thin film measurement system, 12" Dual cassette open handler Wafer handling, 6" Wafer handling with handler charge, 12" Spectroscopic ellipsometer Pattern recognition Operating system: Windows XP Computer: Pentium 1.25 GHz SCSI Hard drive: 80 GB DVD/RW Drive DRAM: 1 GB Flat panel LCD display Keyboard and trackball Ethernet PCIA Card Multi layer film capacity Micro spot optics Scanning stage Wafer mapping In-situ capability Controller type: PC / VME Operator manual DBS Spot sizes: 2.7, 10, 40 um XENON Light source Wavelength range: 220 nm to 800 nm 2003 vintage.
KLA / TENCOR ASET F5x is a wafer testing and metrology equipment that provides cost-effective, high throughput, and accurate measurements of semiconductor wafers. This enables fast and accurate analysis of production process performance and yields. The system is comprised of multiple subsystems, including optical imaging, metrology, and defect review. The optical subsystem utilizes comprehensive, state-of-the-art display technology, which provides superior resolution and detection of defects on the wafer. This includes the use of high quantum efficiency CMOS-type (Charge-Coupled Device) sensors, with improved background noise levels to deliver improved accuracy and contrast. Along with optical imaging, the unit also offers a unique combination of image analysis algorithms to optimize classification and detect potential defects. The metrology subsystem provides highly precise determination of critical device parameters. It's capable of sampling from a large area and evaluating the throughput of a range of wafer sizes and thicknesses. This machine also offers superior wafer mapping as well as the ability to characterize a particular region of a wafer in detail using full-field imaging. The defect review subsystem integrates advanced image quality metrics and statistical defect validation techniques to help accurately identify and classify any potential issues. It's capable of delivering a complete analysis of defect type, trend, occurrence, region, origin, and location. The subsystem also provides a powerful software solution for efficiently managing and refining test recipes, ensuring that any potential issues are quickly identified. In conclusion, KLA ASET-F5X wafer testing and metrology tool is an advanced instrument that provides reliable, accurate, and cost-effective measurements of semiconductor wafers. The asset enables efficient control of the production process, reducing waste and improving yields. Its highly precise imaging, metrology, and defect review capabilities make it an invaluable tool for any semiconductor manufacturing facility.
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