Used KLA / TENCOR ASET F5x #9232878 for sale
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ID: 9232878
Wafer Size: 8"
Film thickness measurement system, 8"
Dual cassette open handler
Wafer handling, 6"
Wafer handling with handler charge, 12"
Spectroscopic ellipsometer
Pattern recognition
Operating system: Windows XP
Computer: Pentium 1.25 GHz
SCSI Hard drive: 80 GB
DRAM: 1 GB
Flat panel LCD display
Keyboard & trackball
Multi layer film capacity
Micro spot optics
Scanning stage
Wafer mapping
In-situ capability
Controller type: PC / VME
Operator manual
DBS Spot sizes: 2.7, 10, 40 um
XENON Light source
Wavelength range: 220 nm to 800 nm.
KLA / TENCOR ASET F5x is a wafer testing and metrology equipment designed for advanced process control in a wide range of industries, including semiconductor, memory, data storage, optoelectronic, display and photomask industries. The system offers high-precision and repeatability for wafer testing and metrology, enabling automated defect inspection and analysis. The F5x unit integrates 360° non-contact, vision-based metrology and testing solutions, including: optical focus/defocus, surface roughness, spectral reflectance, CD/width, overlay, opaque mask defect, etched step height, and material analysis. Advanced digital optics, precision optics, motion boards, beam combiners, pattern recognition technology, and image analysis techniques are used to facilitate an accurate analysis of sample wafers. Moreover, the machine is equipped with the latest Semiconductor Production Control Tool (SPCS) and X-Ray technology, offering precise real-time measurement and control, as well as a fully automated pattern recognition and error correction mechanism. This helps to maximize defect detection and minimize false alarms. KLA ASET-F5X is suitable for high-volume wafer testing and metrology, with high speed, repeatability, and low cost-of-ownership. Its intuitive user interface can be tailored to meet operational requirements and supports a variety of languages, including English, Japanese, Korean, Chinese, and German. The asset's best-in-class performance and robustness have been proven to support a variety of metrology applications and quality control needs. This helps customers to maintain the highest levels of process control, ensuring product quality, and providing a stable production environment.
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