Used KLA / TENCOR ASET F5x #9240202 for sale
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ID: 9240202
Wafer Size: 8"
Film thickness measurement system, 8"
Open cassette, 8"
Spectroscopic ellipsometer
Dual-beam spectrometer (DBS)
Xenon light source: Wavelength range 220 nm to 800 nm
DBS Spot sizes: 2.7 um, 10 um, 40 um
Pattern recognition (PatMax)
2.8-GHz Pentium-IV Star bright computer
Hard drive: 80-Gb IDE
DDR RAM: 512-Mb
Ethernet PCIA card: 10 Base-T and 10 Base-100 communications protocol
Operating system: Windows XP
Flat-panel display: 17-inch color LCD
Keyboard and trackball
DVD / RW Drive and Floppy disk drive, 3.5"
DVDR / RW Blank diskette
Start-up kit
Modular wafer handler
With dual open cassette back of cabinet
Standard SE
Pattern recognition patmax
Platen single finger, 200 / 300
P4 Computer, 2.8 GHz
PCA, Matrox orion, Frame Grab, PCI
220 V, 50/60 Hz.
KLA / TENCOR ASET F5x is a high-performance wafer testing and metrology equipment specifically designed for the semiconductor industry. It offers a variety of features to provide accurate and reliable measurement, processing and characterization of wafers. The system consists of a modular wafer station, waferhandler, desktop processor, and display. The wafer station of KLA ASET-F5X is an automated wafer handling unit with a high adherence to process recipes. It is designed to handle multiple wafers sizes, so it can easily be adapted for a variety of production procedures. The machine can also be accessed remotely, making it ideal for remote process control. The unique waferhandler feature allows for rapid loading and unloading of wafers. This allows the tool to work quickly, maximizing throughput and accuracy. This feature also allows the user to choose from a wide range of automated or manual wafer handling options. Additionally, the asset is capable of collecting data from the wafer surfaces up to 6mm thick. The desktop processor provides the user with an intuitive interface and processing power to analyze the collected data. This processor includes an onboard Graphical User Interface (GUI) to provide a friendly and easy-to-use environment for data management. The incorporated modular architecture for data acquisition and data analysis capability utilizes high-end signal-processing techniques to achieve high-precision wafer analysis. The display of TENCOR ASET F 5 X provides the user with a wide field-of-view. This allows the user to quickly monitor the wafer testing and metrology process by displaying a live view of the process measurements. The display also comes with an optional touchscreen feature, allowing for more control and flexibility when interfacing with the model's menus and settings. TENCOR ASET F5x is a comprehensive wafer testing and metrology equipment that combines precision and performance with ease of use. With its modular architecture, ease-of-use and wide range of wafer handling capabilities, ASET F5x is an excellent choice for semiconductor production processes.
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