Used KLA / TENCOR CI-T53P #293635058 for sale

KLA / TENCOR CI-T53P is a wafer testing and metrology equipment designed for time to time process control applications. It is a standalone configuration that combines advanced system architectures and integrated optomechanical components to provide reliable, high performance metrology services. The T53P is capable of performing a wide range of process control measurements including such as resistivity, resistivity measurement, oxide thickness, film quality, critical dimension (CD)/diameter, sidewall angle, current leakage, and depth analysis. It can also evaluate metrology images from a viewing camera and analyze wafer pattern features such as line width, gate height, overhang angle and mask alignment. The Metrology Capability of the T53P unit consists of four key phases for comprehensive process control and consistent device manufacturing. Included within the T53P is a highly advanced software package to manage the total process. The software includes an intuitive graphical user interface which provides an easy method to input settings, generate test programs and store test results. The machine also comes with a powerful array of statistical analysis tools to further define process control results while controlling wafer metrology conditions and analysis levels. The tool's scanning capability provides detailed information on semiconductor dot structures to pave the way for quick wafer metrology services with ample test images. Its Substrate Interchangeability Tool has the ability to instantly measure complex patterns and compare them to previous specifications. This helps ensure that the right design moves forward. The T53P asset enables superior performance for large-scale tests. It has large field of view and high data capture rate for quick turn-around times. It also features an intuitive operation, allowing engineers to set up parameters, customize process flows, and generate detailed results in seconds. The T53P is a fully integrated model with all the necessary tools for accurate testing and analysis. It is an all-in-one solution for advanced process control. With its robust features, the equipment allows manufacturers to accurately identify process defects, validate their process fidelity and maintain their production process down the line.