Used KLA / TENCOR CTC / FT / FT-500 / FT-530 #293609395 for sale
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KLA / TENCOR CTC / FT / FT-500 / FT-530 is a wafer testing and metrology system, designed for the precision optical testing of semiconductor wafers. Its automated operation and robust design permit reliable and repeatable testing of wafers with a high level of accuracy and repeatability. The system uses advanced, high-resolution metrology measurements and advanced control algorithms to accurately measure a variety of features on a semiconductor wafer's surface, including topography, CD (critical dimension) uniformity and dopant amounts. KLA CTC / FT / FT-500 / FT-530 consists of four main units: an optical head, a wafer stage, an optical interferometer and a scanning software package. The optical head is an advanced unit that houses four optics, including a measurement objective, a reference objective and two numerical objectives. Together, these optics gather a detailed image of the wafer surface and then project a series of converging footprints onto the wafer surface. The wafer stage is a motorized goniometer platform that precisely positions the wafer and orients it in relation to the optics. The optical interferometer is a high-end unit that measures displacement, displacement boundaries and flatness. The device uses a laser and a diffraction grating to create an interference pattern on the wafer surface, and then uses a computer to analyze the pattern, providing a precise and repeatable measure of flatness. Finally, the scanning software package is used to automate and control the wafer testing and metrology process. The software enables a user to set up and monitor the testing process, analyze measurement results and generate reports.Additionally, the software includes a variety of features that optimize the testing process, including automatic back testing functionality and auto-referencing capability. TENCOR CTC / FT / FT-500 / FT-530 is ideal for use in precision optical testing applications that require accurate, repeatable measurements of semiconductor wafers. The system's automated operation and robust designs permit reliable and repeatable testing of wafers with a high level of accuracy and repeatability. Overall, CTC / FT / FT-500 / FT-530 is the perfect solution for wafer testing and metrology needs.
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