Used KLA / TENCOR D6 #9249608 for sale

KLA / TENCOR D6 wafer testing and metrology equipment is a precise automated content inspection and metrology tool designed to meet the accuracy and throughput requirements of sub-5nm and next-generation processes. It is equipped with advanced optics, advanced algorithms and automated controls — all built on a precision platform that enables fast, accurate measurements on patterned semiconductor wafers. KLA D6 meets all the requirements for advanced nodes, especially for sub-5nm and beyond. It is the most advanced wafer tester from KLA on the market right now, and can measure nanometer-scale structures and defects with extremely fine accuracy. The system also offers sophisticated backside metrology capabilities, which can help detect and measure a variety of features such as overlay accuracy, red line, aperture size, lithography vias, resist open, etc. For processing and throughput, the unit features a multi-beam scan head with a fast head rate, and uses advanced algorithms and optics to ensure higher precision and faster measurement. The machine is also equipped with a fully automated wafer indexer to speed up the sample loading and unloading process. It also has a high-performance detection tool, and it uses sophisticated algorithms to quantify elements such as critical line widths, resist widths, resist profile, etc. The asset offers integration and data analysis capabilities such as recipe creating, analyzing and editing, reporting capabilities for viewing and printing results, as well as a variety of supporting software tools for data analysis, such as WTM (Wafer Test Matrix) to reach accurate measurements with minimal bias. Overall, TENCOR D6 wafer testing and metrology model provides the industry-leading accuracy and throughput for sub-5nm and beyond processes, and has been designed to meet the needs of the most demanding production environments.