Used KLA / TENCOR eRanger 5200 #293621218 for sale
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ID: 293621218
Wafer Size: 12"
Vintage: 2009
SEM Defect review system
(2) Loadports
Chamber.
KLA / TENCOR eRanger 5200 is an automated wafer testing and metrology equipment that is used to measure and inspect a wide variety of parameters on integrated circuits (ICs). It is designed to deliver accurate and reliable results. The system is equipped with advanced technology to enable multiple functions such as wafer testing, defect analysis, 3D imaging, and wafer-to-database mapping. KLA eRanger 5200 is equipped with an automated wafer handling unit that allows for high throughput production with zero-defect-free results. The machine can accommodate up to seven wafers with a range of sizes from 75 mm to 300 mm. The tool is also equipped with various sensors and metrology functions for accurate measurements. It can measure voltage and leakage current, resistance, temperature, and more with a high accuracy level. The asset is also capable of performing advanced 3D imaging to visualize defects. The model is equipped with an integrated image processing subsystem that enables defect assessment and analysis. It has powerful image processing algorithms that can identify defects in wafers ranging from a few nanometers to several microns. It also has advanced characterization features to analyze features such as alignment and dimensional variations. The equipment also includes a robust software package with a powerful graphical user interface (GUI) to allow easy operation. The system is also equipped with a host of sophisticated wafer-to-database mapping tools to enable efficient comparison of test results against design data. The unit is capable of performing automated tests to quickly identify unique defects and develop corrective action strategies. By automating these tasks, the machine helps reduce setup time and cost associated with chip development. It offers a high level of repeatability, as well as accuracy and reliability, making it an ideal choice for wafer testing and circuit design.
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