Used KLA / TENCOR eRanger 5200 #293625706 for sale

KLA / TENCOR eRanger 5200 is a wafer testing and metrology equipment designed to provide quick and accurate analysis and measurements of semiconductor devices. The system is designed to quickly, accurately, and repeatably scan and measure up to 4" and 200mm wafers. It can measure a large variety of parameters, from basic surface defects to complex profiles, characteristics, and processes. KLA eRanger 5200's advanced imaging technologies provide high resolution images of defects and process signatures, with superior precision and repeatability for maximum wafer yield. TENCOR eRanger 5200 is built on a completely automated platform, eliminating the need for manual handling of wafers. The unit can be quickly configured to measure a variety of defects and processes on any size wafer. The integrated wafer magazine holds up to 80 wafers for automated wafer loading, and the automated wafer mapping ensures the highest levels of repeatability. The integrated robotic handler allows the machine to quickly and accurately move the wafer around while performing tests and measurements. ERanger 5200 offers both automated and manual inspection capabilities, allowing engineers and operators to quickly identify defects or process signatures in greater detail. Automated inspection mode sets peak measurements and sort out nonqualified wafers, while manual mode allows the user to adjust parameters and perform more detailed inspections. The tool also features 500µm line width resolution on critical features, along with high spot density and feature coverage. The asset includes a range of software applications that are designed to increase throughput and accuracy. This includes KLA Targetrunner Co-Planarity software for measuring wafer coplanarity, as well as TENCOR Insight for viewing images, analyzing data, and generating reports. KLA / TENCOR eRanger 5200 also includes KLA / TENCOR GP-View software to automate scrolling and zooming of images, allowing for greater detail when analyzing defects. Overall, KLA eRanger 5200 is an advanced wafer testing and metrology model that can quickly and accurately identify and quantify a wide range of process and defect types. Its advanced imaging and software features allow the equipment to achieve superior repeatability and precision, reducing overall wafer yield loss.