Used KLA / TENCOR eRanger 5200 #9263058 for sale
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KLA / TENCOR eRanger 5200 is a next-generation wafer testing and metrology equipment designed as an advanced tool for measuring film thickness and optical materials on wafers. This system is designed to provide ultra-high resolution, speed, and accuracy while ensuring high quality results. The unit is based on a hybrid semiconductor/metrology platform, including a solid-state laser scanning microscope, optical microscope, quad-detector, X-ray reflectometer, and other advanced metrology technology. KLA eRanger 5200 provides a wide range of measurement and analysis capabilities including surface imaging, optical surface properties, film deposition/etching, machine calibration, and more. Its non-contact optical machine has a moving-mirror controller and high-resolution imager, enabling high-speed measurement, even on the edges of a wafer. Additionally, the X-ray reflectometer provides a unique solution for material characterization, enabling the operator to measure film thickness and film density in a few seconds. TENCOR eRanger 5200's advanced software packages offer comprehensive capabilities including automated job setup, automatic process montoring, wafer map editing, and statistical process control. It also provides image analysis and calculation, along with advanced statistical data handling routines. In order to ensure accuracy, this tool has proven to be highly repeatable with traceable accuracy. ERanger 5200 also utilizes a quad-detection-asset, allowing four wafers to be simultaneously pooled into a single measurement. This allows for faster test times and improved throughput. The model also features a flexible wafer handling equipment that provides maximum compatibility with different types of wafers. KLA / TENCOR eRanger 5200 has been designed to increase process yield and product quality through improved wafer testing and metrology. Its combination of high-resolution imaging and advanced software features significantly improves wafer-level testing capabilities, providing reliable results and increased process visibility. It can be used in a variety of industries, such as semiconductor, MEMS, LED, and solar cells. The system's flexible architecture also allows for integration into existing semiconductor processes, allowing for even greater productivity.
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