Used KLA / TENCOR F5x #9236720 for sale
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ID: 9236720
Wafer Size: 12"
Vintage: 2003
Film thickness measurement system, 12"
2003 vintage.
KLA / TENCOR F5x is a wafer testing and metrology equipment that utilizes advanced technologies to provide a comprehensive solution for test and inspection of semiconductor wafers. KLA F5x is equipped with an array of automated wafer inspection tools that enable wafer level testing for process, yield, automation, and advanced failure analysis. TENCOR F 5 X is made up of several key components, including an LED array for illuminating the wafer surface, an integrated optical detection system which captures the reflected signals for signal to noise optimization, and a high precision motion stage, to ensure the highest accuracy of image data. Additionally, TENCOR F5x utilizes Digital Image Correlation (DIC) and is available with either full Silicon Level Unit (SLS) technology or the SLS 9352 platform to measure the image features and identify defects. F5x can inspect both patterned and bare wafers as well as advanced process steps such as overlay inspection and metrology analysis. Additionally, KLA / TENCOR F 5 X is equipped with a fast segmentation algorithm which can quickly and accurately detect particles and particles' shape parameters and quantify them. KLA F 5 X is a versatile platform that allows users to adjust the operation and settings to observe a variety of defects. It can also utilize automated wafer defect throughput processed by three separate stages: Image analysis, Contrast Detection, and Measurement. Its advanced capabilities include the ability to inspect transistor gates, MOS caps, and contact vias, in addition to conventional mask defects and particle defects. In addition, F 5 X is designed with an active transport machine that streamlines wafer movement and positioning between the stages as well as a fast load and unload times, making it an ideal choice for high-throughput processing. It also features an intuitive user interface and user-friendly workflow programming, empowering users to precisely control the tool and configure it to the specific needs of their application. Overall, KLA / TENCOR F5x provides a comprehensive solution for wafer testing and metrology that ensures quick and accurate results. Its sophisticated array of advanced technologies and features make KLA F5x an optimal choice for a variety of inspection and defect detection requirements.
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