Used KLA / TENCOR F5x #9243619 for sale
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ID: 9243619
Wafer Size: 12"
Vintage: 2001
Film thickness measurement system, 12"
FOUP: (2) TDK TAS300
YASUKAWA Robot
PC System
Hard Disk Drive (HDD) missing
2001 vintage.
KLA / TENCOR F5x is a state-of-the-art wafer testing and metrology equipment used for quality assurance in semiconductor device fabrication. It is designed to provide highly accurate and repeatable measurements of a wide variety of wafer properties. KLA F5x features a sophisticated CCD camera system, providing accurate and repeatable measurements of the topography of test wafers, as well as a full suite of failure analysis and defect density applications. It is fully automated, allowing exacting control over process measurements to help ensure the highest quality standards of semiconductor devices. TENCOR F 5 X incorporates a variety of imaging technologies, comprising both inspection and metrology capabilities. In particular, its CCD camera unit captures images of a wafer in 614 different segments, with each segment analyzed using spectral photometry to extract detailed optical light scattering characteristics. This is followed by a series of automated tests, such as those for critical dimension (CD) and defect density measurement, as well as die-to-die defect assessment. Alongside its CCD camera machine, F5x also features an integrated optical profilometer, providing 3D topography information and real-time cross-sectional imaging. It also includes a full suite of failure analysis capabilities, including automatic defect location and classification, failure transmission electron microscopy (TEM) overlay, and defect isolation for further analysis. Finally, F 5 X offers a comprehensive suite of data analysis tools, allowing the user to quickly and reliably interpret, export, and apply data from wafer testing and metrology applications to help optimize process control. This includes access to a range of statistical algorithms, helping to monitor for non-random trends and patterns. In summary, KLA / TENCOR F 5 X is a highly advanced tool for semiconductor device wafer testing and metrology. It provides an automated platform for measuring and assessing topography, failure analysis, and defect density, while also featuring an array of data analysis tools to support process optimization. With its impressive range of capabilities, TENCOR F5x makes a valuable contribution to ensuring the highest quality standards of semiconductor device production.
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