Used KLA / TENCOR Flexus #9007344 for sale

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KLA / TENCOR Flexus
Sold
ID: 9007344
Measurement system.
KLA / TENCOR Flexus is a next-generation wafer testing and metrology equipment, which combines an efficient integrated design with the latest optical technologies and advanced automated processes for maximum throughput and accuracy. The system is designed to provide comprehensive wafer-level testing and analysis of semiconductor devices. The advanced closed-loop, vision-based architecture of the unit allows it to simultaneously measure and analyze up to 24 slides of test wafers per hour. KLA Flexus is unique in that it utilizes precision imaging and computational capabilities to create a single platform for the whole process from contact to contactless and back. It integrates a number of powerful elements, such as high-speed cameras, laser metrology tools, and powerful image processing algorithms, enabling it to accurately measure each layer, spot defects, and capture critical device parameters such as transistor gate width, contact pad diameter, doping levels, and device performance metrics. This level of accuracy and repeatability means TENCOR Flexus can provide substrate-independent accuracies of less than 1nm. The machine utilizes a stage-integrated Closed Loop Solutions Engine (CLSE) which serves as an intelligent, self-learning precision robotic controller. The CLSE automatically adjusts tool parameters to optimize asset performance and accuracy. It also integrates predictive analytics to anticipate upstream and downstream process-related events, enabling the model to automatically and rapidly adjust its parameters in response to changing conditions. These features help to minimize equipment setup times and maximize throughput. Flexus also includes built-in capabilities for data logging, data analysis, and in situ reporting, allowing for the quick and easy generation of complex performance and reliability reports. Furthermore, the system is effectively upgradeable, allowing users to add or adjust metrology tools to accommodate changes in device design or test parameters. All in all, KLA / TENCOR Flexus is a powerful and highly advanced wafer testing and metrology unit that provides users with an integrated solution for fast and accurate wafer testing and metrology. With its ability to simultaneously measure and analyze up to 24 slides of test wafers per hour, its predictive analytics capabilities, and its upgradable hardware and software, KLA Flexus is well equipped to serve as the cornerstone of any wafer testing and metrology facility.
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