Used KLA / TENCOR FLX-2320 #293597103 for sale

KLA / TENCOR FLX-2320 is a flexible, automated wafer testing and metrology equipment designed for high-throughput inspection and analysis of advanced 3D semiconductor structures. The tool can detect features as small as 2.5 nanometers and provide a comprehensive analysis of critical electrical and optical parameters in complex wafer structures. KLA FLX-2320 uses a proprietary combination of lasers and optics to accurately discern features in the semiconductor layers. Laser-induced optical signals are measured and analyzed in real-time, delivering very precise measurements of feature sizes, film thicknesses and other properties. A scanning electron beam system is then used to create an Automated Measurement and Analysis (AMAT) map of the wafer structure. This enables the on-wafer measurement of electrical, optical and other parameters with a high degree of accuracy. The unit also offers a variety of process control tools. A total of 32 independent, parallel metrology channels are available for controlling multiple process steps. Additionally, the machine can be integrated with standard and specialty software packages, including process control and test programs, allowing for seamless integration into other production and test systems. TENCOR FLX 2320 is designed to provide highly accurate test data, reduce measurement time, reduce waste and improve process yield. The tool features easy to use scripting functions and compatibility with various analysis programs, resulting in reliable, repeatable measurements. Moreover, the tool is user-friendly, with a graphical user interface that can support fast and easy programming by personnel with limited experience. Overall, FLX 2320 offers a robust, highly accurate wafer testing and metrology solution for advanced semiconductor fabrication. With its high-throughput capabilities and powerful process control tools, it is an ideal choice for a variety of semiconductor development and manufacturing applications.