Used KLA / TENCOR FLX-2320 #293765088 for sale

ID: 293765088
Wafer Size: 4"-6"
Vintage: 1999
Thin film stress measurement system, 4"-6" Laser movement non-functional Solid state laser: 3650 + 750 nm Hard Disk Drive (HDD) PC Operating system: Windows 3.1 1999 vintage.
KLA / TENCOR FLX-2320 equipment is a robust, high speed wafer testing and metrology system designed specifically to optimize the inspection and measurement of critical features on 28nm and smaller wafer sizes. Utilizing state-of-the-art technologies, KLA FLX-2320 is positioned as the market leader in high-precision wafer inspection and characterization. Equipped with the latest KLA breakthrough technology, TENCOR FLX 2320 offers unprecedented inline speed and accuracy. Its confocal microscope and multi-stage imaging architecture utilize dual-side imaging capability and an optimized, non-contact probing unit to provide an unprecedented real-time sample examination. With its dual-processing, real-time image detection technology, FLX 2320 is capable of measuring the most challenging features and defect sizes with high accuracy and speed. Utilizing a high-density detector array, it provides detailed measurements with 1.5nm resolution for sub-micron devices. Additionally, its custom built pattern recognition machine can detect the most complex patterns and distinguishing them from false positives. For optimal accuracy, KLA / TENCOR FLX 2320 tool is programmed with a configurable metrology model. This includes capabilities to profile process variables and inspect cross-die, as well as layer specific process variables at a single layer level. Additionally, its in-line autofoci capability allows high throughput measurements that increase the process stability and accuracy. KLA FLX 2320 also offers automated wafer defect detection capabilities. Based on a combination of configurable pattern recognition, feature selection and enhancement algorithms, the asset can detect and report the presence of defects with a high degree of predictability and accuracy. Finally, TENCOR FLX-2320 model offers a complete, automated solution for wafer testing and metrology. Its advanced capabilities, real-time inspection and defect detection, premium resolution and reliable operation make it an ideal choice for high-volume manufacturing lines.
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