Used KLA / TENCOR FLX-2320 #293792562 for sale
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KLA / TENCOR FLX-2320 Wafer Testing and Metrology Equipment is a fully automated, high throughput process control system designed to accurately and quickly measure the electrical and physical characteristics of wafers. It features multiple integrated technologies such as electrical die test, mid-segment inspection (MSI), material inspection, optoelectronic characterization, laser reflectometry, thin-film metrology, machine vision, and 2D/3D complex surface measurements. KLA FLX-2320 boasts a high throughput data acquisition unit which can measure up to twenty wafers per hour. This systems design includes specialized wafer handling and alignment capabilities that are safeguarded by a vacuum chucking fixture to ensure wafer alignment. The wafers are then loaded into the testing station where they undergo electrical die test and MSI measurements. The electrical die tests measure electrical parameters such as conductance, resistance, and dielectric constant. These measurements allow for accurate identification of faulty electrical components among the wafers. The MSI tests use laser diode illumination and imaging technology to inspect and detect small process variation among optical and electrical properties. The material inspection allows for rapid analysis and comprehensive measurement of wafer planarity and edge finish. The optoelectronic characterization machine allows the tool to capture images of the patterns of the wafers with sub-50 micron resolution. The laser reflectometry is capable of measuring wafer thickness, surface roughness and ellipsometric sheets for film deposition. The post-process thin film metrology accurately measures critical film characteristics including reflectance, transmission, phase, and azimuth spectra. The integrated machine vision asset, then, is utilized to analyze images from the wafers to detect, characterize and quantify any material defect. Last but not least, TENCOR FLX 2320 is also equipped with a two-dimensional and three-dimensional complex surface measurements model which measures topographic surface information with precision and accuracy. Overall, KLA / TENCOR FLX 2320 Wafer Testing and Metrology Equipment is an advanced and reliable tool for wafer analysis and failure analysis. It offers a high degree of precision and accuracy, with the speed and efficiency desired by industry professionals. With its multiple integrated technologies and features, the system is reliable and highly configurable - perfect for the modern semiconductor industry.
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