Used KLA / TENCOR FLX-2320 #9036651 for sale
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ID: 9036651
Wafer Size: 8"
Vintage: 1994
Stress Measurement System, 8"
1994 vintage.
KLA / TENCOR FLX-2320 rapidly inspects, test and metrologized 300mm wafers, with the ability to provide accurate 2D images and 3D contour maps. KLA FLX-2320 is an advanced equipment capable of operating with advanced process control functionality, allowing for quick and reliable decisions to be made based on the data it captures and inspects. The system performs wafer analysiss and depth measurements quickly, with a process that includes high values and detailed resolution. Additionally, the unit allows for a fast, accurate and repeatable measurement of a wafer's electrical characteristics. TENCOR FLX 2320 is comprised of multiple components that allow it to run its various functions. This includes the scanner, which rapidly processes the images of the chips on the wafer; the metrology machine, which can measure and verify the electrical characteristics of the wafer; and the defect localization tool, which is capable of identifying, quantifying and classifying any defects found on the wafer surface. Additionally, the asset is capable of analyzing the wafer's shape, confirming that it conforms to the design specification and can detect any form-factor or structural errors. Finally, FLX 2320 is equipped with a throughput measurement model that provides fast, reliable and repeatable throughput measurements, allowing for detailed process monitoring. Overall, KLA / TENCOR FLX 2320 is a powerful and reliable tool for improving the quality of a variety of 300mm wafer inspection processes. It is capable of providing clear and detailed images, measuring and verifying electrical characteristics, analyzing shapes, and measuring throughput, all in a rapid and repeatable fashion. Furthermore, it has been designed with advanced process control and reliability, allowing it to provide quick and accurate decisions based on the data that it inspects and captures.
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