Used KLA / TENCOR FLX-2320 #9269304 for sale

KLA / TENCOR FLX-2320
ID: 9269304
Film stress measurement system.
KLA / TENCOR FLX-2320 is a flat array inspection and metrology equipment designed to provide high-precision measurements of integrated circuit wafers. Featuring a flexible metrology platform, this system is capable of performing numerous wafer tests and measurements to ensure each wafer is functioning properly. With its high-end optical technology, KLA FLX-2320 is also capable of detecting small features and defects on the wafer surface. The unit features a powerful software suite designed to provide complete metrology capabilities. The suite makes use of motion control technology, which allows for controlled operations like Z-height measurements, scan, focus and drift control. The software suite also utilizes a number of other advanced technologies such as edge enhancement, optical profilometry and image analysis to ensure the accuracy of its measurements. In addition, the machine can also be integrated with other machines for non-contact surface measurements. It includes a scan head option, which supports a wide range of wafer sizes from 4 to 12 inches in diameter. This ensures that the tool can be used for applications requiring a variety of different tests and measurements. When used in combination with its powerful software, TENCOR FLX 2320 gives users with the ability to quickly capture high resolution metrology data. This asset is ideal for applications such as defect inspection, process control, line monitoring, critical dimension, overlay and film thickness. With its high precision measurement capabilities and flexible setup, it is the perfect model for wafer testing and metrology.
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