Used KLA / TENCOR FLX-2320 #9293253 for sale

KLA / TENCOR FLX-2320
ID: 9293253
Thin film stress measurement system.
KLA / TENCOR FLX-2320 is a wafer testing and metrology equipment designed for in-line, high-throughput operations. This state-of-the-art system combines advanced precision algorithms and optical technologies to deliver the highest level of accuracy and reliability. KLA FLX-2320 couples fast full-wafer scanning with advanced defect detection algorithms, and provides real-time automated defect classification. This enables users to address a broad range of process, materials and yield management issues. TENCOR FLX 2320's advanced optics unit delivers full-wafer metrology and measurement capabilities that cover the entire array of established test parameters, such as line width, line edge roughness and critical dimension. This machine incorporates multiple optical channels to analyze 2D and 3D topography, and provides precise imaging of local areas and feature edges. TENCOR FLX-2320 also provides automated accuracy and repeatability during its in-line, full-wafer scanning operations. It is equipped with alignment systems that ensure precise alignment with the feature being measured, as well as precise alignment between sensors on the same wafer. This ensures that all measurements taken on the same wafer are at the same level of accuracy. The advanced optical tool of FLX 2320 enables swift data transmission and processing, making it suitable for high-volume manufacturing. The high throughput capability of FLX-2320 makes it an ideal choice for wafer testing and metrology and yields information on defect trends in production fields. This asset is designed for high-reliability cleanroom operation and is backed by a full maintenance program from KLA. KLA FLX 2320 is extremely easy to use and is a must-have for today's wafer testing and metrology. It is an ideal solution for customers who need a reliable and accurate model for in-line, high-throughput operations.
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