Used KLA / TENCOR FLX-2320A #293619108 for sale
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ID: 293619108
Wafer Size: 8"
Vintage: 1996
Thin film stress measurement system, 8"
1996 vintage.
KLA / TENCOR FLX-2320A is an automated wafer testing and metrology equipment designed for efficient measurements of semiconductor wafer substrates. The system is capable of testing up to five wafers simultaneously, performing wafer-level tests for electrical and optical properties in minutes. The unit is equipped with a powerful X-Ray optics machine, giving it the capability to measure layer thicknesses, dopant concentrations, and crystal orientation from surfaces. It also features optical electron emission microscopy (EEM) which can image surface features and provide electrical information deep into the substrate to accurately diagnose the cause of the failure. Additionally, the tool is outfitted with multiple detectors, including lasers, spectrometers, and probes that enable high-resolution imaging and measurements of parametric on-wafer performance. KLA FLX 2320 A runs on an intuitive, user-friendly operator interface, making it easy to analyze and report test results with minimal effort. TENCOR FLX-2320-A can create reports in various industry-standard formats, providing summary and detailed data in user-defined formats. Additionally, the report and test results generated are saved in the asset for future use and comparison. FLX 2320 A also supports a variety of automation applications, such as programmable test equipment, machine vision, and software-driven machine tools. The model is SQL-compliant, enabling direct access to SEMI Standard Database (SSDB). TENCOR FLX 2320 A is also equipped with powerful hardware such as a high- speed, high-density dual-core processor, and a large memory, enabling fast and accurate wafer testing and measurement. In conclusion, KLA FLX-2320A is a powerful wafer testing and metrology equipment, designed specifically to provide highly accurate and repeatable measurements. The system is capable of performing a wide range of measurements, including X-Ray optics, EEM, laser, spectrometers and probes, and supports a variety of automation applications. This unit is ideal for testing semiconductor wafers, and facilitates data analysis, reporting, and storage with its intuitive interface and SQL-compliant architecture.
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