Used KLA / TENCOR FLX-2320A #293754089 for sale

ID: 293754089
Vintage: 1993
Thin film stress measurement system 1993 vintage.
KLA / TENCOR FLX-2320A is a high performance wafer testing and metrology equipment that provides reliable and accurate results for semiconductor device characterization and process control. The system features an advanced optical design utilizing an automated, linear motor-driven platform to accurately and consistently measure device features over the full range of wafer sizes. The unit is designed to provide fast and accurate defect sizing, imaging and defect analysis capabilities while ensuring high throughput. KLA FLX 2320 A is equipped with a number of proprietary technologies to provide superior resolution and accuracy in wafer testing and metrology. The machine features an I-DAD interface, which stands for "integrated Defect Analysis and Detection," to provide detailed defect analysis and device characterization. The I-DAD tool uses dual laser scanning and vertical illumination combined with multiple camera images to generate a 3D image of the wafer surface for quick and accurate defect sizing and identification. The asset is also capable of measuring the electrical characteristics of each device on the wafer with time-domain reflectometry. This adds to the model's metrology capabilities and provides valuable insight into the electrical performance of each device on the wafer. The addition of the TDR channel provides users with the ability to gain a deeper understanding of the electrical characteristics of each device on the wafer. Moreover, TENCOR FLX-2320-A is equipped with an advanced image processing equipment to classify and categorize defects. This feature helps reduce time spent on manual inspection and sorting of defects, increasing accuracy and throughput. The system is powered by Windows 7 and contains a 10 bit gray scale CCD with 256 gray level resolutions and up to 1617 nm/px. The wafer stage is capable of accommodating up to 650mm wafers. It also includes an easy-to-use graphical user interface and a built-in wafer take-out robot for automated wafer handling. In conclusion, KLA FLX-2320A is a powerful and reliable wafer testing and metrology unit that offers advanced features such as a comprehensive I-DAD interface, TDR channel, image processing capabilities, and an automated wafer handling machine. The tool is designed to provide high performance wafer testing, metrology, and defect analysis capabilities in order to ensure accurate results and high throughput.
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