Used KLA / TENCOR FLX-2908 #9385708 for sale
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ID: 9385708
Thin film stress measurement, parts system
Power supply: 230V, 15A, Single Phase, 50Hz.
KLA / TENCOR FLX-2908 is a wafer testing and metrology equipment specifically designed for advanced wafer level defect inspection. It offers a combination of high speed and high resolution in a single system, keeping upfront costs and recurring expenses low. This unit is capable of inspection of numerous dies on a given wafer, enabling simultaneous measurements of both critical dimension (CD) and electrically measured parameters (E & S parameters). Furthermore, this machine incorporates a multiple product on-board measurement tool, meaning it can automatically measure multiple feature types (including aggressive features and parameter-intensive ones) across a wafer. KLA FLX-2908 inspects and measures the desired parameters with up to 5-µm CD/XP resolution. It implements sophisticated imaging, pattern matching, and 3D height profile measurement algorithms to detect subtle defects without sacrificing measurement speed. This asset contains a variety of onboard metrology technologies, like optical CD/XP measurement, 2D topological feature measurements, and other metrology techniques. It also includes an integrated high magnification inspection model that focuses on defect and contamination detection. This equipment can also accommodate future inspection platforms, like optical defect inspection. TENCOR FLX 2908 has superior CD/XP measurements, unparalleled precision and high reliability. Its' hybrid metrology system features an extensive measurement range, flexible inspection capabilities, and high throughput. Additionally, it offers an automated calibration process, enabling frequent and precise metrology measurements. This unit also includes enhanced SPC capabilities, improved within-die measurement repeatability, and an automated data save/restore machine. This tool has a small form factor with integrated robotics and can even be used in small-sized cleanrooms. Its design enables task automation, using robotic transportation to move wafers and components back and forth for fast and easy Inspection/Metrology. Lastly, TENCOR FLX-2908 incorporates advanced statistical process control (SPC) software, which aids data collection, analysis, and reporting to help guarantee consistent quality.
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