Used KLA / TENCOR FLX-5400 #10547 for sale
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ID: 10547
Wafer Size: 8"
Vintage: 1996
Stress Measurement System, 8"
Software version: 4.25
Software: WinFLX
SMIF type: No
Cassette plate: 6", 5", 4"
PC: Pentium 120 MHz
Laser:
670nm: 3.149
750nm: 3.540
1996 vintage.
KLA / TENCOR FLX-5400 is an advanced wafer testing equipment designed to provide state-of-the-art wafer inspection and analysis. This system utilizes an advanced optical microscope and image processing technology to inspect the entire surface area of completed wafers with high precision and accuracy. Images are then evaluated using inspection software to detect defects and micro-defects, assess consistency, and qualify features of interest on the wafer. The optical microscope incorporated into KLA FLX-5400 utilizes high-magnification lenses and its unique optical design to ensure a high inspection resolution. The lens is capable of providing magnifications of up to 1000X, which enables the unit to detect microfeatures as small as 5um. The image data generated from the microscope is also processed by specialized software that utilizes both 2-dimensional and 3-dimensional image analysis techniques to detect defects, measure feature sizes, and compare images over time to look for any changes to the surface of the wafer. TENCOR FLX 5400 also includes an automated loading and handling machine that enables easy setup and retrieval of the wafer sample for inspection. This loading and handling tool allows FLX-5400 to easily switch between different wafers with varying types of features, enabling rapid and efficient analysis of each sample. In combination with its advanced optical inspection technology, TENCOR FLX-5400 is also equipped with automated defect assessment capabilities that can identify, categorize, and quantify surface defects. This automated analysis enables manufacturers to quickly and accurately assess the quality of their wafer sample, allowing them to make informed decisions on production and process control. FLX 5400 is a powerful and versatile asset that offers a comprehensive solution to wafer testing and analysis requirements. By providing both automated and manual inspection, it is able to ensure the highest quality standard for a wide range of materials and structures. This combination of capabilities make KLA / TENCOR FLX 5400 an ideal choice for wafer manufacturers looking to optimize their production process.
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