Used KLA / TENCOR FLX-5400 #293623331 for sale

KLA / TENCOR FLX-5400 represents the next generation of wafer testing and metrology systems. This versatile, high performance equipment is ideal for both production and R&D applications. It is capable of simultaneous testing of a wide variety of wafer structures, from 200 mm to 450 mm. It has one of the highest levels of production capacity in the industry, and is capable of supporting the latest metrological methods, such as automatic disposition feedback loops and integrated defect review mechanisms. KLA FLX-5400 features a number of innovative design features. The system utilizes a stand-alone robotic manipulator, which can move up to 9 degrees of freedom, to enable 3-D alignment and wafer handling. The illumination unit implements multiple LED sources to minimize variability, while a proprietary optimization algorithm keeps imaging uniform across the entire field of view. This helps ensure accurate measurement results. The machine also makes use of KLA advanced multi-spectral strobed imaging techniques. This technique uses wideband excitation with three calibrated cameras to capture both the spectral and angular information of each wafer layer. The powerful processor then combines this multi-spectral data into a single measurement channel. This enables rapid, accurate measurements of wafer features, such as surface topography, active area, proximity and edge. For defect characterization, TENCOR FLX 5400 includes a number of advanced tools and algorithms. The tool utilizes Auto-Ready, a technology which allows the user to quickly set up a variety of detection, classification and analysis algorithms. This includes features such as process monitoring, disease analysis, stress and strain analysis and optical microscopy. KLA / TENCOR FLX 5400 includes a robust software package, that provides all of the tools necessary to analyze and report the results from each measurement. This includes tools for data filtering, statistics, reporting, trend analysis and correlation. In addition, the asset incorporates SmartDefects Plus, which makes it easy to detect and isolate defects, as well as apply corrective actions. Furthermore, KLA FLX 5400 boasts a wide range of application flexibility. Users are able to configure the model to process any type of wafer structure, even accommodating structurally complex substrates that may require additional setup. Moreover, it is capable of operating in both single-wafer and cassette-to-cassette configurations, making it well-suited for a variety of production processes. Overall, TENCOR FLX-5400 is a highly advanced equipment, capable of high-precision metrology and defect analysis. This system is very well-suited for a myriad of production-level wafer testing and metrology applications, and offers many benefits for current and next-generation wafer testing needs.